Compact body, which can fit to small space The built-in tube fitting type can indicate pressure only by inserting a tube.
Ultra-small and light weight Width:8.5mm, Height:24mm, Length:41mm Weight:10.7g (for ø4mm push-in fitting)
Built-in needle valve model Flow adjustable needle valve and sensor are integrated into one unit. Effortless plumbing and minimized installation space are realized.
Capable of flow management and confirmation of adsorption of small workpieces. Built-in needle valve type High accuracy: ±3% F.S. or less. Accurate flow measurement is possible. High speed response: 50msec or less. High speed response is achieved by using a platinum sensor chip that applies silicone micromachining. Contributes to shorter tact time.