For the use of the two to three-stage dry compressing "DS" and "RUTA" pump systems, we combine the DRYVAC backing pumps with RUVAC WA(U), WS(U), WH(U) and RA. A single flow layout can achieve pumping speeds of 250 to 16,000 m³/h. Higher pumping speeds can be achieved by arranging pumps in parallel. The achievable working pressures are defined by the number of pump stages or parallel pump systems.